- The Effect of Water Droplets on the Nano Particle Size Distribution using the SMPS System
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Seon-Ae Hwangbo, Min-Cheol Chu
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J Powder Mater. 2013;20(2):129-133.
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DOI: https://doi.org/10.4150/KPMI.2013.20.2.129
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- In this paper we have studied the effect of water droplet size on nano-particle size distribution using SMPS(Scanning Mobility Particle Sizer)system. It can be seen that the unknown peak at >100 nm was caused by water droplets which did not dry completely when DI water was used as a solvent in the SMPS system. Therefore, it is important to dry water droplets generated from atomizer in the SMPS system when measuring the particle size distribution using less than 100 nm nano-particles in diameter. From this study, It can be concluded that the napion was a useful material as dryer ones and using EAG(Electro Aerosol Generator) as a particle generator was the most effective in reducing the effect of water droplets.
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Citations
Citations to this article as recorded by  - Investigation of a Standard Particle Deposition System on Wafer Surface and Its Application to Wafer Cleaning
Younsun Cho, Seokjun Hong, Seungjae Lee, Jichul Yang, Seung-Ki Chae, Taesung Kim
ECS Journal of Solid State Science and Technology.2019; 8(12): P768. CrossRef
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